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Growth, Processing and Characterization of MBD-Grown Si/Si02 Superlattices

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Helsinki University of Technology | Licentiate thesis
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Date

2005

Department

Sähkö- ja tietoliikennetekniikan osasto

Major/Subject

Elektronifysiikka

Mcode

S-69

Degree programme

Language

en

Pages

83

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Description

Supervisor

Sinkkonen, Juha

Thesis advisor

Novikov, Sergei

Keywords

Si, Si, SiO<sub>2</sub>, SiO<sub>2</sub>, MBD, MBD, MBE, MBE, superlattices, superhila, light emission, valoemission, annealing, lämpökäsittely

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https://urn.fi/URN:NBN:fi:aalto-202104155784

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[lic] Teknillinen korkeakoulu / TKK

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